ULVAC Coating Corporation

ULVAC Coating Corporation, which uses the brand name ULCOAT, is a member of the ULVAC Group and a joint venture between ULVAC, Inc. and the chemicals trading company Inabata & Co., Ltd. It was established on January 1, 1979 in Chichibu, Saitama, after being spun off from ULVAC's film-forming business division, which had succeeded in developing the world's first mask blanks in 1970. The company is a comprehensive manufacturer of mask blanks, a core material essential for the production of semiconductors and flat panel displays, and is one of only a few companies in the world capable of integrated production from glass processing of raw materials to finished mask blanks. It supplies mask blanks and services to customers in Europe, the United States, and various parts of Asia.

ULVAC Coating Corporation was established on January 1, 1979, when the SI division of Nippon Shinku Gijutsu (now ULVAC) was separated and became independent, and its headquarters and plant were moved to the current location in Chichibu. The origins of the business trace back to 1970, when ULVAC (then Nippon Shinku Gijutsu) began prototyping and developing mask blanks; in 1972 it began selling the world's first mask blanks, and in 1973 it began exporting mask blanks to the United States. In 1986, the company established IHT Corp. in the United States through a merger with Kyushu Vacuum Metallurgical Co., Ltd. and Inabata & Co., Ltd., and developed and began selling dry etching equipment for masks. In 1988 it began manufacturing chromium films (BM) for FPD color filters. It began manufacturing phase-shift mask blanks in 1995. In 2001 it established a local subsidiary in Taiwan, Taiwan Mask Corporation (台灣成膜光電股份有限公司). In 2005 it made Fine Surface Technology Co., Ltd. (glass polishing) a subsidiary. In 2006 it began selling glass MEMS products. In 2010 it began selling halftone mask blanks for FPDs, and in 2013 it began selling phase-shift mask blanks for FPDs. In 2018 it established a local subsidiary in China, Aifake Chengmo Technology (Hefei) Co., Ltd. (愛発科成膜技術（合肥）有限公司).

One of only a few companies in the world capable of integrated production of mask blanks, from glass processing to finished products.

• Semiconductor mask blanks

• Flat panel display mask blanks

1. 1企業情報 - ULVAC アルバック成膜株式会社ulcoat.co.jp
2. 2沿革 - ULVAC アルバック成膜株式会社ulcoat.co.jp
3. 3Ulvac Coating Corporation (Japan)wikidata.org