THK Precision Co., Ltd.

THK Precision Co., Ltd. is a Japanese manufacturer of ultraprecise positioning stages and high-sensitivity force sensors, headquartered in Ota-ku, Tokyo. The company is a member of the THK Group, whose parent THK Co., Ltd. is a major Japanese manufacturer of linear motion guides and mechanical components. THK Precision positions itself around "ultraprecise positioning" as a core elemental technology, supplying nanometer-scale motion control and force sensing to industries such as semiconductors, flat panel displays, biotechnology, MEMS, fine machining, materials, and energy. The company's product portfolio includes piezo stages capable of up to 1 nm resolution and millisecond response, piezo motor stages with long stroke and built-in scales, coreless linear motor stages for smooth low-ripple motion, focusing positioners for microscope and inspection equipment, mirror tilt mechanisms for laser scanning and optical alignment, stages for high-precision machining, and micro-force sensors that detect milligram-level loads. These products are used in semiconductor and FPD manufacturing and inspection equipment, atomic force microscopes, HDD inspection, analytical instruments, optical communication and measurement, laser processing, cell observation, and precision mold machining. THK Precision emphasizes that it is a Japanese-made, in-house-developed stage manufacturer able to customize products from a single unit, and that as part of the THK Group it can leverage THK's nationwide and global sales and support network. The company was founded in 2002 as Nanocontrol Co., Ltd., changed its name to THK Precision Co., Ltd. in 2019 after a 2009 capital and business alliance with THK, and has around 21 employees as of January 2026. Its representative directors include Chairman Akihiro Teramachi, who is also Chairman of THK Co., Ltd., and President Yuji Wakatsuki.

THK Precision Co., Ltd. traces its origins to a pre-venture project of the Japan Science and Technology Corporation (now Japan Science and Technology Agency) running from 1999 to 2002. In January 2002, the company was established as Nanocontrol Co., Ltd. (有限会社ナノコントロール). In March 2002 it moved its head office to Minamioi, Shinagawa-ku, Tokyo, and in April 2002 it was reorganized as Nanocontrol Co., Ltd. (株式会社ナノコントロール), beginning manufacture and sales of "core-driving actuators" and "fine-motion stage units." In November 2002 it commercialized and began selling a "focusing positioner." In June 2003 it commercialized a "coarse/fine motion stage unit," and in December 2004 it commercialized a "stage for ultraprecision machine tools." In June 2005 it commercialized a "multi-axis controller." In February 2006, its "force sensor" was recognized as a successful commissioned development project by the Japan Science and Technology Agency, and in October 2006 the force sensor was commercialized, along with a "nanostep slider." In July 2009, the company entered into a capital and business alliance with THK Co., Ltd. In December 2010, it moved its head office to Nerima-ku, Tokyo. In May 2013 it commercialized a "micro-force sensor," and in June 2013 a "precision motor stage." In November 2017 it moved its head office to Higashikojiya, Ota-ku, Tokyo. In April 2018 it commercialized a "piezo motor stage." In September 2019, the company changed its name to THK Precision Co., Ltd. In January 2021 it published General Catalog Vol. 7. In August 2024 it moved its head office to Haneda Asahicho, Ota-ku, Tokyo (MFIP 102), where it remains as of the latest company information. As of January 2026, the company had 21 employees and capital of 50 million yen. Its leading shareholder is THK Co., Ltd., and its main bank is Mitsubishi UFJ Bank, Gotanda Branch. The company describes itself as a development-oriented enterprise based on product and technical capabilities, aiming to deepen and expand precision positioning technology and support the manufacturing industry.

• Participated in a pre-venture project of the Japan Science and Technology Corporation (now Japan Science and Technology Agency).

• Established as Nanocontrol Co., Ltd. (有限会社ナノコントロール).

• Moved head office to Minamioi, Shinagawa-ku, Tokyo.

• Reorganized as Nanocontrol Co., Ltd. (株式会社ナノコントロール); began manufacture and sales of core-driving actuators and fine-motion stage units.

• Commercialized and began selling the focusing positioner.

• Commercialized the coarse/fine motion stage unit.

• Commercialized the stage for ultraprecision machine tools.

• Commercialized the multi-axis controller.

• Force sensor recognized as a successful commissioned development project by the Japan Science and Technology Agency.

• Commercialized the force sensor and the nanostep slider.

• Entered into a capital and business alliance with THK Co., Ltd.

• Moved head office to Nerima-ku, Tokyo.

• Commercialized the micro-force sensor.

• Commercialized the precision motor stage.

• Moved head office to Higashikojiya, Ota-ku, Tokyo.

• Commercialized the piezo motor stage.

• Changed company name to THK Precision Co., Ltd.

• Published General Catalog Vol. 7.

• Moved head office to Haneda Asahicho, Ota-ku, Tokyo (MFIP 102).

A Japanese-made, in-house-developed manufacturer of ultraprecise positioning stages and force sensors, offering custom solutions from single units and backed by the THK Group's sales and support network.

• Piezo Stage

  Ultraprecise positioning stage with up to 1 nm resolution and fast response, ideal for precise positioning over small ranges; available in many variations.

• Piezo Motor Stage

  Long-stroke high-precision stage capable of nanometer-level positioning over a travel range of tens of millimeters, with built-in scale for high repeatability.

• Linear Motor Stage

  Precision long-stroke stage using a coreless linear motor, offering smooth and stable motion from low to high speed even with high payloads, and high positioning accuracy.

• Force Sensor

  Force detection sensors including a micro-force type responsive to milligram-level loads and a high-rigidity type stable for loads over 100 N.

• Micro-Force Sensor

  High-sensitivity load sensor that detects and measures minute forces in the milligram range.

• Focusing Positioner

  Built into microscopes, inspection/measurement equipment, and observation devices to achieve high-speed, high-precision lens focusing.

• Mirror Tilt Mechanism

  Piezo-driven mirror tilting with sub-μrad resolution, optimal for laser beam scanning and precise optical axis alignment.

• Stage for High-precision Processing

  Nano/micro machining stage with robust structure for stable and precise position control of cutting tools and heavy workpieces.

• Multi-axis Controller

  Controller for multi-axis positioning systems, commercialized in 2005.

• Nanostep Slider

  Nanometer-step slider commercialized in 2006.

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2. 2企業情報｜精密位置決めステージのTHKプレシジョンthkprecision.co.jp
3. 3THKプレシジョンとは｜精密位置決めステージのTHKプレシジョンthkprecision.co.jp
4. 4THK Precision Co., Ltd. (Japan) - Wikidatawikidata.org