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Revasum

A global leader in silicon carbide single-wafer processing equipment.

Last updated September 1, 2026

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Overview

Revasum specializes in the design and manufacturing of capital equipment used in the semiconductor device manufacturing process. Its product portfolio includes grinding, polishing and CMP equipment used to manufacture substrates and devices for the global semiconductor industry. The company's headquarters and manufacturing facility is based in San Luis Obispo, California, United States.

History

Revasum specializes in the design and manufacturing of capital equipment used in the semiconductor device manufacturing process. The company has leveraged its significant intellectual property portfolio to develop the new flagship 6EZ Silicon Carbide Polisher, which, alongside the 7AF-HMG Silicon Carbide Grinder, provides Revasum's customers with an optimized, fully automated single-wafer grind and polish toolset. The solution is configurable for SiC wafers 200mm and below. The company's headquarters and manufacturing facility is based in San Luis Obispo, California, United States. The company also has both direct and independent sales and service offices located in the US, China, Europe, Japan, Korea and Taiwan.

Products and positioning

World leader in SiC single-wafer processing equipment.

  • 6EZ Silicon Carbide Polisher

    World's first fully-automated, single wafer, dry-in-dry-out polisher designed specifically for SiC.

  • 7AF-HMG Silicon Carbide Grinder

    Silicon carbide grinder that, alongside the 6EZ polisher, provides an optimized, fully automated single-wafer grind and polish toolset.

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