Plasma-Therm
Plasma-Therm designs and builds configurable wafer processing platforms for plasma etch, deposition, thermal processing, and plasma dicing used in microelectronics manufacturing.
Last updated September 11, 2026
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Overview
Plasma-Therm is a company that designs and builds configurable wafer processing platforms for standard and advanced processes used in microelectronics manufacturing, covering etch and deposition applications, rapid thermal processing, and plasma dicing. Its product categories include etch, deposition, thermal processing, and plasma dicing systems. The company states that its systems support etch, deposition, thermal, material modification, and die singulation applications for existing and emerging microelectronics markets, and that its technologies and partnerships have empowered customers and research institutions to advance semiconductor and healthcare applications. Its careers page references a headquarters in Florida.
History
Plasma-Therm states that as it began 2026 it reflected on a year of innovation, growth, and expanding global presence in 2025, and that its technologies and partnerships have empowered customers and research institutions to advance semiconductor and healthcare applications. Its careers page references a headquarters in Florida.
Products and positioning
Premium plasma etch, deposition, and advanced packaging equipment for creating semiconductor devices.
Etch systems
Modular designs for flexible configuration and material handling.
Deposition systems
Engineered to continually deliver outstanding coverage, highly uniform film deposition, and material control.
Thermal processing systems
Designed to ensure damage-free material removal or create robust coatings that improve substrate surfaces.
Plasma dicing systems
Yield enhancing plasma singulation systems that address pain points of traditional saw dicing.
Recent events
Plasma-Therm acquires OEM Group’s dry process equipment business[5]
Plasma-Therm acquired OEM Group’s dry process equipment business, including the original licenses and intellectual property rights for SFI Endeavor, AG Heatpulse, MRC Eclipse and Tegal brand equipment.
Sources5 sources
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