Park Systems
South Korean scientific-instrument company specializing in atomic force microscopes and other nanoscale measurement technologies.
Last updated August 26, 2026
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Overview
Park Systems is a South Korean scientific-instrument manufacturer best known for atomic force microscopes (AFMs) and related nanometrology systems. The company serves research, industrial, and semiconductor customers that need to measure, image, characterize, or control surfaces and structures at the nanoscale. Its product portfolio has expanded beyond conventional AFM systems to include imaging spectroscopic ellipsometers, active vibration isolation tables, and digital holographic microscopes. The company was established on April 7, 1997, under the name PSIA. Its founder, Dr. Sang-il Park, had previously worked in the laboratory of Stanford professor Calvin Quate, where early experimental work on atomic force microscopy was carried out by Quate, Gerd Binnig, and Christoph Gerber. Park later founded Park Scientific Instruments in Silicon Valley in 1988. After that business was sold to Thermo Electron, he returned to South Korea and established PSIA, with the name reflecting an ambition to develop more advanced instrumentation than the earlier PSI business. In its early period, PSIA initially sold imported products associated with Park's previous company while building its own engineering and manufacturing capabilities. A major early product milestone came in 2002 with the release of the XE-100, described as the first research AFM developed in Korea. The company moved its headquarters to the Korea Advanced Nano Fab Center in 2006 and adopted the Park Systems name in April 2007, following its tenth anniversary. Park Systems' core technology is based on AFM systems that use a decoupled flexure-scanner architecture. In this design, the XY scanner moves the sample horizontally while a separate Z scanner moves the probe vertically. The company also markets a non-contact operating approach known as True Non-Contact, intended to reduce mechanical interaction between the probe and sample during measurement. South Korea designated the company's industrial AFM technology as a National Core Technology in 2010. The company has pursued closer integration with advanced semiconductor manufacturing. In 2015, Park Systems and IMEC began a joint development project focused on industrial AFM technology for semiconductor production, followed by a second joint development project announced in 2020. These efforts reflect the company's positioning between laboratory microscopy and production-oriented process metrology, where repeatability, automation, nondestructive measurement, and compatibility with semiconductor workflows are important. Park Systems became publicly traded on the KOSDAQ market in December 2015 under ticker 140860. It operates internationally through branch offices and commercial activities in North America, Europe, and Asia. Its expansion has also included adjacent optical and environmental measurement technologies. In 2022, the company announced the acquisition of Accurion GmbH, a German producer of imaging spectroscopic ellipsometers and active vibration-isolation tables. In early 2025, it acquired Lyncée Tec, a Swiss manufacturer of digital holographic microscopes. These transactions broadened Park Systems' offering from AFM-centered nanoscale surface analysis toward a wider portfolio of precision imaging and measurement tools.
History
Park Systems traces its technical origins to the development of atomic force microscopy at Stanford University. In 1986, Sang-il Park was a doctoral student in Calvin Quate's laboratory during the period when Quate, Gerd Binnig, and Christoph Gerber achieved the first experimental implementation of AFM. After completing his doctorate, Park founded Park Scientific Instruments, or PSI, in Silicon Valley in 1988. PSI manufactured atomic force microscopes and was later sold to Thermo Electron. Park returned to South Korea after the sale of PSI and founded PSIA on April 7, 1997. The final letter in PSIA represented the company's aspiration to pursue more advanced technology than the earlier PSI business. During its initial years, PSIA relied partly on selling imported PSI products while developing its own products and manufacturing base. This transition from distributor and successor organization to original equipment developer was central to the company's identity. In 2002, PSIA introduced the XE-100, identified as the first research AFM developed in Korea. The release established the company's domestic technology credentials and provided a foundation for subsequent research and industrial systems. PSIA moved its headquarters to the Korea Advanced Nano Fab Center in 2006. On April 6, 2007, it changed its name to Park Systems, a change that marked its tenth year and gave the company a name more closely associated with its founder and technical heritage. The company's engineering approach centers on AFM and scanning-probe microscopy. Its systems use a decoupled flexure scanner in which the sample is moved horizontally by the XY scanner and the probe is moved vertically by a separate Z scanner. Park Systems also promotes a True Non-Contact mode that allows measurements without direct physical contact between the probe tip and sample surface. The company's industrial AFM technology was designated a National Core Technology by the South Korean government in 2010. Park Systems increasingly targeted semiconductor manufacturing as well as academic and industrial research. On March 23, 2015, it and IMEC launched a joint development project for industrial AFM technology intended for semiconductor production. Later that year, on December 17, Park Systems was listed on the KOSDAQ stock exchange under ticker 140860. A second joint development project with IMEC was announced on February 17, 2020, continuing the relationship in semiconductor-oriented metrology. The company subsequently expanded through acquisitions and adjacent technologies. On September 6, 2022, Park Systems announced the acquisition of Accurion GmbH, a German manufacturer of imaging spectroscopic ellipsometers and active vibration-isolation tables. In early 2025, Park Systems acquired Lyncée Tec, a Swiss maker of digital holographic microscopes. These additions extended the company beyond AFM into optical characterization, vibration control, and holographic imaging. Park Systems is headquartered in Suwon, Gyeonggi Province, and maintains branch offices in the United States, Japan, Singapore, Taiwan, Germany, and Switzerland.
- 2025
Lyncée Tec acquired
[1]Park Systems acquired Swiss digital holographic microscopy company Lyncée Tec.
- 2022
Accurion acquisition announced
[1]Park Systems announced its acquisition of Accurion GmbH and its ellipsometry and vibration-isolation businesses.
- 2020
Second IMEC development project announced
[1]Park Systems and IMEC announced a second joint development project.
- 2015
IMEC joint development project begins
[1]Park Systems and IMEC began a project to develop industrial AFM technology for semiconductor manufacturing.
- 2015
KOSDAQ listing
[1]Park Systems became publicly traded on KOSDAQ under ticker 140860.
- 2010
Industrial AFM technology designated National Core Technology
[1]South Korea designated Park Systems' industrial AFM technology as a National Core Technology.
- 2007
PSIA becomes Park Systems
[1]The company changed its name to Park Systems on April 6.
- 2006
Headquarters moves to KANC
[1]PSIA moved its headquarters to the Korea Advanced Nano Fab Center.
- 2002
XE-100 introduced
[1]PSIA released the XE-100, described as Korea's first research AFM.
- 1997
PSIA established
[1]Sang-il Park founded PSIA in South Korea on April 7.
Products and positioning
A high-end scientific-instrument and nanometrology supplier serving academic research, materials science, biotechnology, semiconductor manufacturing, and other industrial applications.
Scientific microscopy and nanometrology
Atomic force microscopes
Park Systems' principal product category consists of atomic force microscopes used to image and measure surfaces at the nanoscale. Applications include semiconductor inspection, materials science, biotechnology, and academic research. The company's systems emphasize precise scanner control, non-contact measurement options, and configurations suited to both laboratory investigation and industrial process metrology.
Research atomic force microscope · 2002
XE-100
Introduced in 2002, the XE-100 was described as the first research AFM developed in Korea. It represented the transition from PSIA's early reliance on imported products toward internally developed and manufactured research instrumentation.
Atomic force microscope
Park NX20
The Park NX20 is a Park Systems AFM platform intended for nanoscale research and characterization. It belongs to the company's broader NX family of instruments, which applies AFM techniques to surface analysis and materials investigation.
High-vacuum atomic force microscope
Park NX-Hivac
The Park NX-Hivac is a high-vacuum AFM offering for applications requiring controlled vacuum measurement conditions. It is part of the company's specialized microscopy portfolio for advanced materials and industrial research.
Optical metrology · 2022
Imaging spectroscopic ellipsometers
Park Systems entered imaging spectroscopic ellipsometry through its acquisition of Accurion. These systems characterize optical properties and thin films, complementing AFM-based topographical and nanoscale measurements.
Laboratory infrastructure · 2022
Active vibration isolation tables
Active vibration isolation tables, obtained through the Accurion business, help stabilize sensitive microscopy and optical experiments by reducing environmental vibration. They support the measurement conditions required by high-resolution scientific instruments.
Optical microscopy · 2025
Digital holographic microscopes
Park Systems expanded into digital holographic microscopy through its acquisition of Lyncée Tec in early 2025. The technology adds quantitative optical imaging capabilities to the company's existing nanoscale measurement portfolio.
Brand decisions
2025
Acquire Lyncée TecM&ABackground
Digital holographic microscopy provided an adjacent imaging technology that could complement Park Systems' nanoscale measurement activities.
Action taken
Park Systems acquired Swiss digital holographic microscope manufacturer Lyncée Tec in early 2025.
Aftermath
The acquisition expanded the company into digital holographic microscopy and strengthened its broader precision-imaging portfolio.
2022
Acquire AccurionM&ABackground
Park Systems sought to extend its portfolio beyond AFM into complementary optical metrology and laboratory stabilization technologies.
Action taken
The company announced the acquisition of Accurion GmbH, a German manufacturer of imaging spectroscopic ellipsometers and active vibration-isolation tables.
Aftermath
The transaction broadened Park Systems' product scope into optical characterization and vibration-control equipment.
2015
Deepen semiconductor metrology development with IMECStrategyBackground
Semiconductor manufacturing requires highly repeatable, precise, and increasingly automated nanoscale measurement technologies.
Action taken
Park Systems and IMEC launched a joint development project for industrial AFM technology, followed by a second project announced in 2020.
Aftermath
The partnership reinforced Park Systems' industrial and semiconductor positioning beyond academic AFM research.
2007
Adopt the Park Systems nameStrategyBackground
After operating as PSIA for its first decade, the company sought a name connected to its founder and its longer-term international identity.
Action taken
PSIA changed its corporate name to Park Systems on April 6, 2007.
Aftermath
The new name became the identity under which the company developed its international scientific-instrument business.
Recent events
Park Systems announces Park SmartLitho software[3]
Reported:
Park Systems announced Park SmartLitho, new software added to the Park SmartScan operating system on Park Systems AFM systems for nanolithography and nanomanipulation.
Sources3 sources
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