Litho Tech Japan Corporation

Litho Tech Japan Corporation (リソテックジャパン株式会社) is a company in Kawaguchi, Japan. Its product information page lists coating and developing equipment, manual resist coating/developing units, bake/cooling units, HMDS bake units, resist evaluation systems, photoprocess analysis exposure systems, resist evaluation tools, photomask products, nanoimprint equipment, simulators, film-thickness measurement systems, spectroscopic ellipsometers, silicon wafer thickness measurement systems, and commissioned measurement and research services.

Litho Tech Japan Corporation is a company in Kawaguchi, Japan. Its product information page presents a range of resist coating, developing and baking equipment, resist evaluation systems and tools, photoprocess analysis exposure systems, photomask products, nanoimprint equipment, simulators, film-thickness and wafer thickness measurement systems, and commissioned measurement and research services.

• LITHOTRAC series

• Litho Spin Cup series

• LWB series

• APPS series

• RDA series

• VUVES-4700i, UVES-2000, UVES-2500, ArFES-3000, EBES-6000, EUVES-7000, EUVES-9000, EUVOM-9000, LUVC-5000

• PAGA-100, WEXA-2, CPA-200, OGCS-550, DUVTA-180, ProxSim II

• Phase Shift Focus Monitor Reticle

• LTNIP-500

• PROLITH 2024a, ProDATA

• KV-300, KF-10, L-2

• UNECS-2000, UNECS-3000

• Si-71

1. 1リソテックジャパン株式会社ltj.co.jp
2. 2リソテックジャパン株式会社 製品情報ltj.co.jp
3. 3Litho Tech Japan Corporation (Japan)wikidata.org