GenISys
GenISys develops, markets and supports software solutions for the optimization of lithography and inspection for nano fabrication processes.
Last updated September 2, 2026
Overview
GenISys GmbH is a company based in Munich, Germany, with subsidiaries in Tokyo, Japan, and San Francisco, California. It develops, markets and supports flexible, high-performance software solutions for the optimization of micro- and nano-fabrication processes. The company was founded in 2005 by Ulrich Hofmann and Nezih Ünal.
History
GenISys GmbH was started in 2005 by Ulrich Hofmann and Nezih Ünal to serve equipment vendors and end-users with fast development and highly dedicated service. In 2005-2006, the Layout Engine was positioned as first OEM product and integrated into the Zeiss MeRiT mask repair system. The end-user product BEAMER was launched in January 2006 at the EMLC conference in Dresden. In 2007-2008, subsidiaries GenISys Inc. in Los Gatos-CA and GenISys KK in Tokyo-Japan were established. In 2008, the LAB lithography simulation software was introduced into the flat panel display industry. The first BEAMeeting took place in 2009 at the MNE conference in Gent.
Sources
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