ASM International
Dutch semiconductor equipment manufacturer specializing in atomic layer deposition and other wafer-processing systems.
Last updated August 21, 2026
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Overview
ASM International N.V. is a Dutch multinational semiconductor equipment company that designs, manufactures, sells, and services systems used in front-end wafer fabrication. Its main areas include atomic layer deposition, plasma-enhanced atomic layer deposition, epitaxy, chemical vapor deposition, and diffusion-related processes. Semiconductor manufacturers use ASM equipment to form extremely thin and precisely controlled material layers on silicon wafers during the production of logic, memory, and other advanced integrated circuits. The company was founded in 1964 by Arthur del Prado as Advanced Semiconductor Materials. It initially operated as a European sales and technology representative in the semiconductor industry before expanding into the design and manufacture of production equipment. Over time, ASM became involved in several important areas of semiconductor manufacturing, including lithography, ion implantation, epitaxy, bonding, and deposition. Some of these activities later became separate companies or divisions. ASML, ASM Pacific Technology, and Besi all have historical connections to ASM, although they are distinct businesses today. ASM is particularly associated with single-wafer atomic layer deposition, or ALD. ALD deposits films through repeated, self-limiting chemical reactions, allowing manufacturers to build highly uniform layers with atomic-scale control. This capability became increasingly important as semiconductor structures became smaller and more three-dimensional. ASM helped move ALD from an advanced research technology into high-volume manufacturing, including applications involving high-k metal-gate structures and later generations of complex transistor and interconnect architectures. Its deposition technologies are designed to support semiconductor scaling, new materials, improved device performance, and lower energy consumption. The company supplies both single-wafer systems, which process wafers individually, and batch systems, which process several wafers at once. Its portfolio includes thermal ALD and plasma-enhanced ALD tools, epitaxy systems for growing crystalline silicon-based layers, single-wafer plasma-enhanced chemical vapor deposition systems, and vertical furnace platforms for low-pressure chemical vapor deposition and diffusion. Representative product families include Synergis, Pulsar, EmerALD, Eagle XP8, XP8 QCM, Intrepid, Epsilon, Dragon XP8, A400 DUO, and Sonora. ASM is headquartered in Almere and maintains research and development activities in the Netherlands, Finland, Belgium, the United States, Japan, and South Korea. Manufacturing is concentrated primarily in Singapore and South Korea, while sales and service operations extend across major semiconductor-producing regions. The company’s customer base is global, with a substantial share of demand coming from Asian semiconductor manufacturers. ASM has been listed on Euronext Amsterdam since 1996 and was added to the AEX index in 2020. It was also listed on Nasdaq for part of its earlier public-company history. The company retains a minority interest in ASM Pacific Technology, a Hong Kong-listed supplier serving semiconductor assembly, packaging, and surface-mount technology markets. After a period of restructuring in the 2010s, ASM focused more tightly on deposition and related wafer-processing technologies. Benjamin Loh became chief executive in 2020, succeeding Chuck del Prado. ASM remains an active specialist supplier whose strategic importance is closely linked to the continued scaling and three-dimensional integration of semiconductor devices.
History
ASM International traces its origins to 1964, when Arthur del Prado founded Advanced Semiconductor Materials in the Netherlands. The original business acted primarily as a European sales and technology representative for semiconductor-fabrication products. It later developed its own manufacturing capabilities and became an equipment supplier to chip producers. During the 1970s, ASM moved into chemical vapor deposition equipment. The company also broadened its international presence: it acquired Fico Toolings in 1974, established ASM Asia in Hong Kong in 1975, and founded ASM America in Phoenix in 1976. Its horizontal plasma-enhanced chemical vapor deposition furnaces became an important growth product. These developments established the company as both a technology developer and a global supplier rather than only a representative business. ASM went public on Nasdaq in 1981 and continued investing in a wide range of semiconductor technologies during the 1980s, including lithography, ion implantation, epitaxy, and wire bonding. The breadth of these activities contributed to the later formation or separation of several influential semiconductor-equipment companies. ASM divested ASML-related and ion-implantation activities in 1988, while its Hong Kong operations were listed as ASM Pacific Technology in 1989. The company reorganized substantially between 1991 and 1994. In 1993, ASM Fico was divested to Berliner Electro Holding, a business later known as Besi. ASM subsequently concentrated on several core equipment areas: vertical low-pressure chemical vapor deposition furnaces in Europe, single-wafer plasma-enhanced chemical vapor deposition systems in Japan, and single-wafer epitaxy systems in the United States. ASM began trading on Euronext Amsterdam in 1996 while retaining a significant interest in ASM Pacific Technology. In the 2000s, ASM invested in 300-millimeter wafer technologies and intensified research into atomic layer deposition. The company’s work helped transfer ALD from a laboratory technology into high-volume semiconductor production. A major application was the introduction of high-k metal-gate structures, which required highly controlled deposition of new dielectric and metal materials. The importance of ALD increased as transistor structures became smaller and shifted from planar designs toward three-dimensional forms such as FinFETs. Arthur del Prado was succeeded as chief executive by his son Chuck del Prado in 2008. The headquarters moved from Bilthoven to Almere in 2009. During the 2010s, ASM implemented a worldwide restructuring program that included a more product-focused organization, a single global sales structure, consolidated manufacturing in Singapore, and shared global functions covering human resources, finance, information technology, operational excellence, and environmental, health, and safety management. Growth in plasma-enhanced ALD and other deposition applications supported the company’s return to structural profitability. ASM also reduced its ownership interest in ASM Pacific Technology to a minority position. In 2020, ASM was added to the AEX index and Chuck del Prado stepped down after twelve years as CEO. Benjamin Loh became chief executive. In the early 2020s, ASM refreshed its vertical furnace offering with the A400 DUO for 200-millimeter wafers and Sonora for 300-millimeter wafers. The company currently focuses on deposition-centered front-end equipment, supported by research and development sites in Europe, North America, and Asia, manufacturing operations primarily in Singapore and South Korea, and sales and service coverage across major semiconductor markets.
- 2022
New vertical furnace generation
[1]ASM renewed its vertical furnace portfolio with the A400 DUO and Sonora platforms.
- 2020
Added to the AEX index
[1]ASM became a constituent of the AEX index on Euronext Amsterdam.
- 2020
CEO succession
[1]Benjamin Loh succeeded Chuck del Prado as chief executive.
- 2009
Headquarters relocated to Almere
[1]ASM moved its Dutch headquarters from Bilthoven to Almere.
- 2007
ALD entered high-volume production
[1]ASM successfully transferred atomic layer deposition into high-volume manufacturing, including high-k metal-gate applications.
- 1996
Euronext Amsterdam listing
[1]ASM shares began trading on Euronext Amsterdam.
- 1989
ASM Pacific Technology listed in Hong Kong
[1]ASM’s Hong Kong semiconductor activities became separately listed on the Hong Kong Stock Exchange.
- 1981
Nasdaq initial public offering
[1]ASM completed an initial public offering on Nasdaq.
- 1975
Hong Kong operations established
[1]ASM Asia was established in Hong Kong and later developed into ASM Pacific Technology.
- 1970
Entry into equipment manufacturing
[1]ASM began designing, manufacturing, and selling chemical vapor deposition equipment.
Products and positioning
Specialist front-end semiconductor wafer-fabrication equipment supplier, with a leading position in single-wafer atomic layer deposition and related thin-film deposition technologies.
Wafer deposition equipment
Atomic layer deposition systems
ASM’s ALD systems deposit films through repeated, self-limiting chemical cycles. Precursors and reactants are introduced alternately, with purge steps between exposures, allowing very precise control of film thickness and uniformity. The portfolio includes thermal ALD systems such as Synergis, Pulsar, and EmerALD, as well as plasma-enhanced platforms including Eagle XP8 and XP8 QCM. These tools are used for demanding thin-film applications in advanced logic, memory, and other semiconductor devices.
Wafer deposition equipment
Epitaxy systems
ASM epitaxy tools grow controlled crystalline silicon-based layers on wafer surfaces. Epitaxial layers can modify electrical characteristics and support the construction of high-performance transistor structures. The company’s single-wafer epitaxy portfolio includes Intrepid and Epsilon, serving applications in which the composition, thickness, and crystal quality of deposited layers must be tightly controlled.
Wafer deposition equipment
Chemical vapor deposition systems
ASM’s chemical vapor deposition portfolio covers both single-wafer and batch processing. Dragon XP8 provides single-wafer plasma-enhanced CVD, while the A400 DUO and Sonora platforms support vertical-furnace low-pressure CVD and diffusion-related processes. CVD systems expose wafers to reactive volatile compounds that form the desired film on the substrate surface. These tools address both advanced and established semiconductor manufacturing requirements.
Vertical furnace · 2020
A400 DUO
A400 DUO is a vertical furnace platform for 200-millimeter wafer processing. It forms part of ASM’s renewed furnace portfolio and is intended for batch low-pressure CVD and diffusion-related semiconductor processes. The platform reflects ASM’s continued participation in mature and specialty wafer-processing segments alongside its advanced single-wafer ALD business.
Vertical furnace · 2020
Sonora
Sonora is a vertical furnace platform designed for 300-millimeter wafers. It supports batch processing applications involving low-pressure chemical vapor deposition and related thermal steps. Sonora was introduced as part of ASM’s effort to update its vertical furnace line for larger-wafer manufacturing environments.
Brand decisions
2022
Renewal of the vertical furnace portfolioGeneration changeBackground
ASM maintained a portfolio spanning advanced single-wafer deposition and batch furnace processing for different wafer sizes and manufacturing applications.
Action taken
The company introduced the A400 DUO for 200-millimeter wafers and Sonora for 300-millimeter wafers as updated vertical furnace platforms.
Aftermath
The new platforms strengthened ASM’s offering in batch low-pressure CVD and diffusion-related processes.
2020
Appointment of Benjamin Loh as CEOOtherBackground
Chuck del Prado decided to step down after twelve years as chief executive.
Action taken
Benjamin Loh was appointed chief executive officer.
Aftermath
The leadership transition occurred as ASM was being increasingly identified with advanced deposition, particularly single-wafer ALD.
2013
Reduction of ASM Pacific Technology ownershipStrategyBackground
ASM’s historical group structure included a major interest in ASM Pacific Technology, whose business focused on assembly, packaging, and surface-mount technology.
Action taken
ASM reduced its holding in ASM Pacific Technology to approximately 25 percent.
Aftermath
ASM Pacific Technology became a minority investment rather than a consolidated core operating business.
2010
Worldwide restructuring and product-focused organizationStrategyBackground
ASM undertook a global restructuring program after a period of operational and financial pressure.
Action taken
The company adopted a product-driven organization, a single global sales organization, consolidated manufacturing in Singapore, and centralized several corporate and operational functions.
Aftermath
The restructuring supported a return to structural profitability and a sharper focus on deposition-related technologies.
2007
Commercialization of atomic layer depositionProduct launchBackground
Semiconductor scaling and the adoption of high-k metal-gate structures increased the need for highly uniform, extremely thin films.
Action taken
ASM brought ALD technology from extended research and development into high-volume manufacturing applications.
Aftermath
ALD became a central element of ASM’s technology positioning and a major platform for serving advanced semiconductor manufacturing.
1993
Divestment of ASM FicoM&ABackground
ASM’s corporate reorganization in the early 1990s narrowed its focus across semiconductor equipment activities.
Action taken
ASM divested ASM Fico to Berliner Electro Holding, later known as Besi.
Aftermath
ASM concentrated more strongly on deposition, epitaxy, and related wafer-processing equipment.
1988
Divestment of ASML-related and ion-implantation businessesM&ABackground
ASM had developed interests across several semiconductor equipment technologies and began separating businesses as part of a portfolio reorganization.
Action taken
The company divested ASML Holding and ASM Ion Implant activities.
Aftermath
The divestments helped create a more differentiated group of semiconductor-equipment businesses while ASM continued developing its own remaining activities.
Recent events
ASM International launches ASM CONNECT[3]
Reported:
ASM International launched ASM CONNECT, a member-only online community for networking, discussions, and knowledge sharing.
ASM International receives TSMC Excellent Performance Award[4]
Reported:
ASM International received TSMC's Excellent Performance Award at the TSMC Supply Chain Management Forum in Taiwan, in recognition of its technology collaboration with TSMC.
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