Canon Anelva Corporation

Canon Anelva Corporation (キヤノンアネルバ株式会社) is a Japanese manufacturer of vacuum and plasma-based production equipment, operating as a subsidiary within Canon Inc.'s Industrial Group. The company's core business is the development, manufacture, and servicing of thin-film deposition systems — including sputtering, evaporation, and chemical vapor deposition platforms — as well as etching and other vacuum process equipment used in the fabrication of semiconductor devices, magnetic storage media, and advanced electronic components. Its technology portfolio spans ultra-high vacuum (UHV) systems, plasma generation, and nanometer-level film-thickness control, which are critical for producing the increasingly miniaturized and complex structures found in modern chips and data-storage devices. Canon Anelva positions itself as a leading company in vacuum technology supporting global manufacturing. Its product lines are organized into three main categories: semiconductor device manufacturing equipment, magnetic device manufacturing equipment, and equipment for electronic device manufacturing and research and development. In addition to complete systems, the company supplies vacuum components such as gauges, valves, and controllers, and provides maintenance services to keep installed equipment operating reliably. The company also offers a platform approach to deposition technology, marketed under the name Adastra, which integrates multiple film-formation techniques into a single system. The company is part of Canon's Industrial Group, one of four industry-focused groups within Canon alongside Printing, Imaging, and Medical. The Industrial Group comprises 15 companies and divisions, including Canon Inc.'s Optical Products Operations, Canon Tokki, Canon Anelva, Canon Machinery, and Canon Semiconductor Equipment, as well as overseas entities such as Canon U.S.A.'s Industrial Products Division, Canon Europa's semiconductor equipment operation, Canon Singapore's Industrial Product Centre, and Canon Nanotechnologies. Within this structure, Canon Anelva contributes vacuum and plasma process expertise to Canon's broader industrial equipment business. Canon Anelva serves device makers worldwide, with a customer base that includes leading semiconductor and magnetic media manufacturers. The company participates in industry associations and consortia in Japan, including the Japan Vacuum Industry Association, the Semiconductor Equipment Association of Japan, the Spintronics Integrated Semiconductor Creation Hub, the Integrated Green-niX research and talent development hub, IDEMA Japan, and the Setouchi Semiconductor Consortium. It exhibits at major industry events such as SEMICON Taiwan, SEMICON India, and the China International Optoelectronic Exposition, reflecting its international sales and support footprint. As a Canon subsidiary, Canon Anelva benefits from the parent company's global sales and service network while maintaining its own engineering and manufacturing operations in Japan. The company continues to invest in vacuum and plasma technologies that enable next-generation devices, including those for AI semiconductors and data centers, positioning itself at the intersection of advanced materials processing and the digital economy.

Canon Anelva Corporation traces its origins to Anelva Corporation, a Japanese company specializing in vacuum technology and equipment. The company was established to develop and commercialize vacuum-based manufacturing equipment, particularly for thin-film deposition used in semiconductor and magnetic storage device production. Over time, Anelva built expertise in ultra-high vacuum systems, plasma processes, and precision film-thickness control, becoming a supplier to major device manufacturers. At some point, Anelva became part of Canon Inc., the Japanese imaging and optical products giant. Following its integration into Canon, the company was renamed Canon Anelva Corporation (キヤノンアネルバ株式会社). It was placed within Canon's Industrial Group, one of four industry-focused groups within Canon alongside Printing, Imaging, and Medical. The Industrial Group is described as a collective of ultra-precision technology professionals handling Canon's industrial equipment business, comprising 15 companies and divisions including Canon Inc.'s Optical Products Operations, Canon Tokki, Canon Anelva, Canon Machinery, and Canon Semiconductor Equipment, as well as overseas entities such as Canon U.S.A.'s Industrial Products Division, Canon Europa's semiconductor equipment operation, Canon Singapore's Industrial Product Centre, and Canon Nanotechnologies. As part of Canon, Canon Anelva continued to develop and market vacuum and plasma process equipment. Its product lines include semiconductor device manufacturing equipment, magnetic device manufacturing equipment, and electronic device manufacturing and R&D equipment. The company also supplies vacuum components such as gauges, valves, and controllers, and provides maintenance services. A notable technology platform is Adastra, which integrates multiple film-formation techniques into a single system. The company emphasizes ultra-high vacuum technology enabling nanometer-level microfabrication, and nanometer-level film-thickness control. Canon Anelva serves device makers worldwide and participates in industry associations and consortia in Japan, including the Japan Vacuum Industry Association, the Semiconductor Equipment Association of Japan, the Spintronics Integrated Semiconductor Creation Hub, the Integrated Green-niX research and talent development hub, IDEMA Japan, and the Setouchi Semiconductor Consortium. It exhibits at major industry events such as SEMICON Taiwan, SEMICON India, and the China International Optoelectronic Exposition, reflecting its international sales and support footprint. The company continues to position itself at the forefront of vacuum technology for next-generation devices, including AI semiconductors and data centers. Its official website highlights themes such as opening the future with vacuum technology, supporting the evolution of AI semiconductors, data centers, and next-generation devices, and contributing to sustainable manufacturing. Canon Anelva maintains a corporate presence in Asao-ku, Kawasaki, Kanagawa, Japan, and operates as a subsidiary of Canon Inc.

• Anelva Corporation founded as a vacuum technology company in Japan

• Anelva becomes part of Canon Inc. and is renamed Canon Anelva Corporation

• Canon Anelva positioned within Canon's Industrial Group alongside Canon Tokki, Canon Machinery, and Canon Semiconductor Equipment

• Adastra deposition platform introduced, integrating multiple film-formation techniques

• Participation in industry consortia including Japan Vacuum Industry Association, Semiconductor Equipment Association of Japan, and Setouchi Semiconductor Consortium

• Exhibiting at SEMICON Taiwan 2026 and SEMICON India 2026

Leading company in vacuum technology supporting global manufacturing, providing advanced thin-film deposition and vacuum process equipment for semiconductor, magnetic, and electronic device production.

• Semiconductor device manufacturing equipment

  Vacuum and plasma-based systems for semiconductor fabrication, including deposition and etching tools.

• Magnetic device manufacturing equipment

  Equipment for producing magnetic storage media and devices using thin-film deposition technology.

• Electronic device manufacturing and R&D equipment

  Systems for electronic device production and research and development applications.

• Adastra deposition platform

  A platform integrating various film-formation technologies with nanometer-level film-thickness control.

• Vacuum components

  Gauges, valves, controllers, and other components for vacuum systems.

• Maintenance services

  Maintenance and support services for installed vacuum equipment.

1. 1トップ | キヤノンアネルバ株式会社anelva.canon
2. 2会社情報 | キヤノンアネルバ株式会社anelva.canon
3. 3インダストリアルグループについて | キヤノンアネルバ株式会社anelva.canon
4. 4ソーシャルメディア公式アカウント | キヤノンアネルバ株式会社anelva.canon
5. 5Anelva Corporation (Japan) - Wikidatawikidata.org