FSI International, Inc. (FSI) is an American manufacturing company based in Chaska, Minnesota, that supplies processing equipment used to manufacture microelectronics, including semiconductor devices.
History
The company's history began with the establishment of Fluoroware, Inc. in 1966, a company that made fixtures to hold the silicon wafers in place during the various processes involved in producing semiconductor devices. When asked to design a drying apparatus, the principals of Fluoroware agreed to do so and established FSI International in 1973 to market this new product.
The company's offerings expanded to meet the market need for equipment used in the fabrication of microelectronics. In the 1990s, the company relocated from its original facility overlooking Hazeltine Lake to a larger site nearby.
In 1999, FSI International announced an agreement to acquire YieldUP International Corp.[1] In October 2012, Tokyo Electron acquired FSI International, Inc. and renamed the division TEL FSI. [2][3]